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    Evaluation of thermal evaporation conditions used in coating aluminum on near-field fiber-optic probes

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    DunnR_1998_(69)1747.pdf (1.031Mb)
    Issue Date
    1998-01-01
    Author
    Hollars, Christopher W.
    Dunn, Robert C.
    Publisher
    American Institute of Physics
    Type
    Article
    Article Version
    Scholarly/refereed, publisher version
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    Abstract
    The effects that the thermal evaporation conditions have on the roughness of aluminum-coated near-field fiber-optic probes were investigated using the high-resolution capabilities of atomic force microscopy. The coating conditions studied include the effects of background gas composition, base vacuum pressure, and aluminum evaporation rate. The effects of aging on the aluminum-coated tips were also evaluated. The results from topography measurements of the resulting aluminumfilm indicated that the most dramatic improvements in the tip coatings can be achieved using high aluminum evaporation rates at base vacuum pressures below 10−5 Torr. These results agree with other studies on thin aluminumfilms and reflect a decrease in oxide formation. For demanding applications of near-field microscopy requiring maximal resolution, the results presented here indicate that it may also be necessary to reduce oxygen and/or water from the vacuum chamber prior to coating.
    Description
    This is the published version, also available here: http://dx.doi.org/10.1063/1.1148836.
    URI
    http://hdl.handle.net/1808/16045
    DOI
    https://doi.org/10.1063/1.1148836
    Collections
    • Chemistry Scholarly Works [610]
    Citation
    Hollars, Christoper W. & Dunn, Robert C. "Evaluation of thermal evaporation conditions used in coating aluminum on near-field fiber-optic probes." Rev. Sci. Instrum. 69, 1747 (1998). http://dx.doi.org/10.1063/1.1148836.

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    Contact KU ScholarWorks
    785-864-8983
    KU Libraries
    1425 Jayhawk Blvd
    Lawrence, KS 66045
    785-864-8983

    KU Libraries
    1425 Jayhawk Blvd
    Lawrence, KS 66045
    Image Credits
     

     

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