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dc.contributor.authorHollars, Christopher W.
dc.contributor.authorDunn, Robert C.
dc.date.accessioned2014-12-05T16:06:02Z
dc.date.available2014-12-05T16:06:02Z
dc.date.issued1998-01-01
dc.identifier.citationHollars, Christoper W. & Dunn, Robert C. "Evaluation of thermal evaporation conditions used in coating aluminum on near-field fiber-optic probes." Rev. Sci. Instrum. 69, 1747 (1998). http://dx.doi.org/10.1063/1.1148836.
dc.identifier.urihttp://hdl.handle.net/1808/16045
dc.descriptionThis is the published version, also available here: http://dx.doi.org/10.1063/1.1148836.
dc.description.abstractThe effects that the thermal evaporation conditions have on the roughness of aluminum-coated near-field fiber-optic probes were investigated using the high-resolution capabilities of atomic force microscopy. The coating conditions studied include the effects of background gas composition, base vacuum pressure, and aluminum evaporation rate. The effects of aging on the aluminum-coated tips were also evaluated. The results from topography measurements of the resulting aluminumfilm indicated that the most dramatic improvements in the tip coatings can be achieved using high aluminum evaporation rates at base vacuum pressures below 10−5 Torr. These results agree with other studies on thin aluminumfilms and reflect a decrease in oxide formation. For demanding applications of near-field microscopy requiring maximal resolution, the results presented here indicate that it may also be necessary to reduce oxygen and/or water from the vacuum chamber prior to coating.
dc.publisherAmerican Institute of Physics
dc.subjectAluminium
dc.subjectThin films
dc.subjectAtomic force microscopy
dc.subjectHigh pressure
dc.subjectNear-field scanning optical microscopy
dc.titleEvaluation of thermal evaporation conditions used in coating aluminum on near-field fiber-optic probes
dc.typeArticle
kusw.kuauthorHollars, Christopher W.
kusw.kuauthorDunn, Robert C.
kusw.kudepartmentChemistry
kusw.oanotesJournal: Review of Scientific Instruments (ISSN: 0034-6748, ESSN: 1089-7623) RoMEO: This is a RoMEO green journal Paid OA: A paid open access option is available for this journal. Author's Pre-print: Author can archive pre-print (ie pre-refereeing) Author's Post-print: Author can archive post-print (ie final draft post-refereeing) Publisher's Version/PDF: Author can archive publisher's version/PDF General Conditions: Publishers version/PDF may be used on author's personal website or institutional website Authors own version of final article on e-print servers Must link to publisher version or journal home page Publisher copyright and source must be acknowledged NIH-funded articles are automatically deposited with PubMed Central with open access after 12 months Mandated OA: (Awaiting information) Paid Open Access: Author Select Notes: For Medical Physics see AAPM policy This policy does not apply to Physics Today Publisher last contacted on 27/09/2013 Copyright: Policy Updated: 04-Oct-2013 - Suggest an update for this record Link to this page: http://www.sherpa.ac.uk/romeo/issn/0034-6748/ Published by: American Institute of Physics (AIP) - Green Policies in RoMEO
dc.identifier.doi10.1063/1.1148836
kusw.oaversionScholarly/refereed, publisher version
kusw.oapolicyThis item does not meet KU Open Access policy criteria.
dc.rights.accessrightsopenAccess


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