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    Atomic force microscopy study of the growth and annealing of Ge islands on Si(100)

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    BerrieC_2002_Atomic.pdf (58.70Mb)
    Issue Date
    2002-03-01
    Author
    Liu, Bing
    Berrie, Cindy L.
    Kitajima, Takeshi
    Bright, John
    Leone, Stephen R.
    Publisher
    American Institute of Physics
    Type
    Article
    Article Version
    Scholarly/refereed, publisher version
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    Abstract
    Atomic force microscopy is used to study the growth and annealing of Ge islands on Si(100) by molecular beam epitaxy. The Ge island shape, size distribution, number density, and spatial distribution under various growth conditions, such as different substrate temperatures, Ge beam fluxes, and annealing times, are investigated. By limiting the growth to a low coverage of 6 ML of Ge, we find that either a low growth temperature (⩽875 K) or a high beam flux can produce films dominated by pyramids of {105} facets. Domes of higher aspect ratios only appear at high growth temperatures or after a long time of annealing at low temperatures. This indicates that in the competition between the different kinetic processes responsible for the pyramid and dome formation, the domes require a higher activation energy and grow slower. We also demonstrate that appropriate annealing at low temperature can form locally ordered arrays of pyramids with a narrow size distribution.
    Description
    This is the publisher's version, also available electronically from http://scitation.aip.org/content/avs/journal/jvstb/20/2/10.1116/1.1459724.
    URI
    http://hdl.handle.net/1808/16199
    DOI
    https://doi.org/10.1116/1.1459724
    ISSN
    1071-1023
    Collections
    • Chemistry Scholarly Works [553]
    Citation
    Liu, Bing et al. (2002). "Atomic force microscopy study of the growth and annealing of Ge islands on Si(100)." Journal of Vacuum Science and Technology B, 20(2):678-684. http://dx.doi.org/10.1116/1.1459724

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    Contact KU ScholarWorks
    785-864-8983
    KU Libraries
    1425 Jayhawk Blvd
    Lawrence, KS 66045
    785-864-8983

    KU Libraries
    1425 Jayhawk Blvd
    Lawrence, KS 66045
    Image Credits
     

     

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