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dc.contributor.authorWilt, Jamie Samantha
dc.contributor.authorGong, Youpin
dc.contributor.authorGong, Ming
dc.contributor.authorSu, Feifan
dc.contributor.authorXu, Huikai
dc.contributor.authorSakidja, Ridwan
dc.contributor.authorElliot, Alan J.
dc.contributor.authorLu, Rongtao
dc.contributor.authorZhao, Shiping
dc.contributor.authorHan, Siyuan
dc.contributor.authorWu, Judy Z.
dc.identifier.citationWilt, J., (2017) Atomically Thin Al2O3 Films for Tunnel Junctions, Physical Review Applied 7:6,
dc.description.abstractMetal-insulator-metal tunnel junctions are common throughout the microelectronics industry. The industry standard AlOx tunnel barrier, formed through oxygen diffusion into an Al wetting layer, is plagued by internal defects and pinholes which prevent the realization of atomically thin barriers demanded for enhanced quantum coherence. In this work, we employ in situ scanning tunneling spectroscopy along with molecular-dynamics simulations to understand and control the growth of atomically thin Al2O3 tunnel barriers using atomic-layer deposition. We find that a carefully tuned initial H2O pulse hydroxylated the Al surface and enabled the creation of an atomically thin Al2O3 tunnel barrier with a high-quality M−I interface and a significantly enhanced barrier height compared to thermal AlOx. These properties, corroborated by fabricated Josephson junctions, show that atomic-layer deposition Al2O3 is a dense, leak-free tunnel barrier with a low defect density which can be a key component for the next generation of metal-insulator-metal tunnel junctions.en_US
dc.publisherAmerican Physical Societyen_US
dc.rights© 2017 American Physical Societyen_US
dc.titleAtomically Thin Al2O3 Films for Tunnel Junctionsen_US
kusw.kuauthorGong, Ming
kusw.kuauthorHan, Siyuan
kusw.kuauthorWu, Judy Z.
kusw.kudepartmentPhysics and Astronomyen_US
kusw.kudepartmentPharmacy Practiceen_US
kusw.oaversionScholarly/refereed, publisher versionen_US
kusw.oapolicyThis item meets KU Open Access policy criteria.en_US

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© 2017 American Physical Society
Except where otherwise noted, this item's license is described as: © 2017 American Physical Society