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Focused ion beam modification of atomic force microscopy tips for near-field scanning optical microscopy
Krogmeier, Jeffrey R. Dunn, Robert C.
Krogmeier, Jeffrey R.
Dunn, Robert C.
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Abstract
A probe for near-field scanning optical microscopy is demonstrated based on a high index glass sphere attached to the end of a conventional atomic force microscopy tip. The sphere is machined into a pyramid geometry using a focused ion beam(FIB) instrument, coated with aluminum to confine the excitation light, and milled further with the FIB to open an aperture at the end of the tip. Near-field fluorescence images of 50 nm fluorescent latex spheres reveal subdiffraction limit spatial resolution, illustrating the utility of these probes for near-field scanning optical microscopy.
Description
This is the published version, also available here: http://dx.doi.org/10.1063/1.1430028.
Date
2001-12-01
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American Institute of Physics
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Keywords
Focused ion beam technology, Near-field scanning optical microscopy, Apertures, Aluminium, Atomic force microscopy
Citation
Krogmeier, Jeffrey R. & Dunn, Robert C. "Focused ion beam modification of atomic force microscopy tips for near-field scanning optical microscopy." Appl. Phys. Lett. 79, 4494 (2001); http://dx.doi.org/10.1063/1.1430028.